ECE 608 Fundamental of MEMS (Fall)

  • Catalog Data: 20-260-608, Fundamentals of MEMS (MICROELECTROMECHANICAL SYSTEMS)
    Introductionto MEMS principles, MEMS materials, fundamental MEMS microstructures, microtransducers and microactuators, MEMS-based sensors, microsystems and control, circuit integration and system partitioning, packing, assembly, and testing. Credit: 3
  • Prerequisite by topic: Senior and graduate status in engineering or physical science
  • Goals: This course is designed to teach the fundamental background of state-of-the-art MEMS technologies for microsensor and microactuator system applications.  Basic concepts of micromachined transducer principles, scaling factors and material issues will be introduced. Fundamental mechanical, electrical, optical, biochemical and fluidic characteristics of the basic microstructures, microsensors and microactuators of MEMS will be discussed, including analytical and computational analysis.  System concepts of MEMS-based microsystems will also be covered with signal conditioning.

ECE 641 MEMS Laboratory (Winter)

    Micromachined device and structure fabrication on silicon semiconductor, surface or bulk micromachining techniques, photolithography, oxidation, thin film deposition, thermal boron doping, ion implantation, isotropic and anisotropic etching, wafer bonding, and sensor and actuator characterization. Credit: 3
  • Prerequisite by topic:  Senior and graduate status in engineering or physical science
  • Goals: This course is designed to teach the foundation of state-of-the-art MEMS (Micro-Electro-Mechanical-Systems) based-on silicon semiconductor and to provide hands-on experience in micromachined device fabrication and characterization for MEMS applications.  Typical processes and process flows for micromachining (fabrication of micro-scale movable part such as microsensors or microactuators) will be discussed, analyzed and demonstrated.  A prototype pressure sensor or accelerometer with micromachined micro-diaphragm will be actually fabricated and characterized to illustrate the micromachining processes.  

ECE 726 Biochips and Lab-on-a-Chips (Spring)

  • Catalog Data:
    Fundamentals of micro and nano fabrication of biochips
    and lab-on-a-chips, on-chip biochemical detection methods, micro/nano fluidics, basic components of lab-on-a-chips, integration of lab-on-a-chips, and micro total analysis systems (uTAS).  Credit: 3
  • Prerequisite by topic: ECES 607 or 608 or consent of instructor
  • Goals: The course is designed to introduce students to the fundamentals of biochips and lab-on-a-chips.  Basic concepts of micro/nano fabrication of biochips, microfluidic devices, analyte on-chip manipulation (separation and immobilization) techniques, on-chip biochemical detection techniques, and integration of lab-on-a-chips will be introduced and discussed. Various biochips, lab-on-a-chips, uTAS and their applications will be covered.

ECE 732 Biosensors and Bioelectronics (Spring)

  • Catalog Data:
    Fundamentals of biosensors, bioelectronics, physicochemical transduction mechanisms for biotransduction, molecular recognition and bio-immobilization principles and procedures, coupled mass transport kinetics of enzyme-catalyzed and molecular binding reactions, fundamentals of electrochemistry and electrochemical biosensors, ion-selective field effect transistors (ISFET), electronic noses and tongues, and protein biochips, bioelectronics for bio-signal conditioning and processing.  Credit: 3
  • Prerequisite by topic: Senior and graduate status in engineering or physical science, ECE 607 or ECE 608
  • Goals: The objective of this course is to provide the advanced student with knowledge and methods required for the design, fabrication and characterization of biosensors and bioelectronics for biochemical, biomedical, clinical and environmental applications.  The fundamentals of molecular recognition and surface science, biomolecular immobilization, transduction mechanism, and non-specific interactions with of enzymes, antibodies, proteins and DNA will be covered in the discussion of various biosensors.  In addition, the basic electronic biosignal conditioning circuits and processing methods will be introduced.  The integration of bioelectronics with biosensors and bioarrays will be discussed to build lab-on-a-chips and micro total analytical systems (mTAS).
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