Facilities
  • Engneering Research Center - Clean Room

    • EQUIPMENT

    STATUS

    Raith 150 E-Beam Lithography Tool

    		 working

    Solitec Mask Aligner

    		 working

    Resist spinner and oven area

    		 working

    Temescal FC1800 E-Beam Evaporator

    		 working

    Amray 1600 LaB6 SEM

    		 working

    March II RIE

    		 working

    Mech'El Wire Bonder

    		 working

    Denton Mini Sputter

    		 working

    KLA Profilometer

    		 working

    Electrical Probe Stations

    		 working

    Ellipsometer

    		 working

  • Injection Molding Machine - BOY 22A (working)
     
  • Hot Embossing Machine - Tetrahedron Associates MTP-10 (working)

  • Electroplating System
  • Laser Machine
  • Screen Printer
  • Lapping Machine
  • Contact Angle Analyzer